Citations are generated automatically from bibliographic data as a convenience and may not be complete or accurate.
National Institute of Standards and Technology (NIST), Commerce Department. "A Framework for Standard Modular Simulation: Application to Semiconductor Wafer Fabrication". Government. Commerce Department, January 1, 2005. https://www.govinfo.gov/app/details/GOVPUB-C13-1d7d08a33cb9fca929f3de4019a1ceb6
National Institute of Standards and Technology (NIST), Commerce Department. (2005, January 1). A Framework for Standard Modular Simulation: Application to Semiconductor Wafer Fabrication. [Government]. Commerce Department. https://www.govinfo.gov/app/details/GOVPUB-C13-1d7d08a33cb9fca929f3de4019a1ceb6
National Institute of Standards and Technology (NIST), Commerce Department. A Framework for Standard Modular Simulation: Application to Semiconductor Wafer Fabrication. Commerce Department, (1 Jan 2005), https://www.govinfo.gov/app/details/GOVPUB-C13-1d7d08a33cb9fca929f3de4019a1ceb6
National Institute of Standards and Technology (NIST), Commerce Department, A Framework for Standard Modular Simulation, GovInfo, (January 1, 2005), https://www.govinfo.gov/app/details/GOVPUB-C13-1d7d08a33cb9fca929f3de4019a1ceb6