[Federal Register Volume 62, Number 237 (Wednesday, December 10, 1997)]
[Notices]
[Pages 65067-65068]
From the Federal Register Online via the Government Publishing Office [www.gpo.gov]
[FR Doc No: 97-32342]


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DEPARTMENT OF COMMERCE

National Institute of Standards and Technology


Announcement of an Opportunity to Join a Cooperative Research and 
Development Consortium for CD-Metrology Below 0.25 Microns

AGENCY: National Institute of Standards and Technology, Commerce.

ACTION: Notice of public meeting.

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SUMMARY: The National Institute of Standards and Technology invites 
interested parties to attend a meeting on January 9, 1998, to discuss 
setting up a cooperative research consortium. The goal of the 
consortium is to achieve commercially available reference standards to 
support CD-metrology for feature linewidths below 0.25 microns. Parties 
participating in the consortium will be loaned (110) and (100) BESO1 
chips and asked to perform a selection of CD measurements.

DATES: The Meeting will take place at 10 a.m. on January 9, 1998. 
Interested parties should contact NIST to confirm their interest at the 
address, telephone number or FAX number shown below.


[[Page 65068]]


ADDRESSES: The meeting will take place at and inquiries should be sent 
to Room B360, Building 225, National Institute of Standards and 
Technology, Gaithersburg, MD 20899-0001.

FOR FURTHER INFORMATION CONTACT: Michael W. Cresswell, Telephone: 301-
975-2072; FAX: 301-948-4081.

SUPPLEMENTARY INFORMATION: The program will be within the scope and 
confines of the Federal Technology Transfer Act of 1986 (Public Law 99-
502, 15 U.S.C. 371Oa), which provides federal laboratories including 
NIST, with the authority to enter into cooperative research agreements 
with qualified parties. Under this law, NIST may contribute personnel, 
equipment, and facilties--but no funds--to the cooperative research 
program.
    Members will be expected to make a contribution to the consortium's 
efforts in the form of personnel, data, and/or funds. This is not a 
grant program.
    NIST and Sandia National Laboratories have successfully fabricated 
and tested prototypes of a new class of reference materials to support 
CD-metrology below 0.25 m. This work has the long-term goal of the 
commercial availability of certified physical standards traceable to 
NIST. As a result of the multiple requests for sample prototypes for 
evaluative purposes that it received, NIST formed an industry 
consortium to maximize the benefits of exchanging independent 
measurement results. That previous consortium ended in July 1997. The 
proposed consortium will last through July 1998.

    Dated: December 4, 1997.
Elaine Bunten-Mines,
Director, Program Office.
[FR Doc. 97-32342 Filed 12-9-97; 8:45 am]
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