[Federal Register Volume 62, Number 203 (Tuesday, October 21, 1997)]
[Notices]
[Page 54614]
From the Federal Register Online via the Government Publishing Office [www.gpo.gov]
[FR Doc No: 97-27798]


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DEPARTMENT OF COMMERCE

National Institute of Standards and Technology


Jointly Owned Invention Available for Licensing

AGENCY: National Institute of Standards and Technology Commerce; 
Commerce.

ACTION: Notice of a jointly owned invention available for licensing.

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SUMMARY: The invention listed below is jointly owned by the U.S. 
Government, as represented by the Department of Commerce and Cornell 
University. The Department of Commerce's ownership interest in this 
invention is available for non-exclusive licensing in accordance with 
35 U.S.C. 207 and 37 CFR part 404 to achieve expeditious 
commercialization of results of federally funded research and 
development.

FOR FURTHER INFORMATION CONTACT:
Technical and licensing information on this invention may be obtained 
by writing to: National Institute of Standards and Technology, 
Industrial Partnerships Program, Building 820, Room 213, Gaithersburg, 
MD 20899; Fax 301-869-2751. Any request for information should include 
the NIST Docket No. and Title for the relevant invention as indicated 
below.
    The invention available for non-exclusive licensing is:
    NIST Docket Number: 96-019.
    Title: Fabrication Of Structures By Metastable-Atom Impact 
Desorption Of A Passivating Layer.
    Description: This invention consists of a new process for 
fabricating microstructures on a surface. It utilizes the energy 
contained in neutral metastable rare gas atoms to remove passivating 
atoms from selected areas of a surface, allowing further chemical 
processing to add or remove material to the exposed areas. Some of the 
advantages of this process are realized by the introduction of atom 
optical techniques, which allow structures to be fabricated with 
significantly higher resolution than can be achieved with optical 
lithography, and with a greater amount of parallelism than can be 
achieved with electron or ion beam techniques.

    Dated: October 15, 1997.
Elaine Bunten-Mines,
Director, Program Office.
[FR Doc. 97-27798 Filed 10-20-97; 8:45 am]
BILLING CODE 3510-13-M