[Federal Register Volume 60, Number 185 (Monday, September 25, 1995)]
[Notices]
[Page 49396]
From the Federal Register Online via the Government Publishing Office [www.gpo.gov]
[FR Doc No: 95-23639]



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DEPARTMENT OF COMMERCE
National Institute of Standards and Technology


Government Owned Inventions

AGENCY: National Institute of Standards and Technology, Commerce.

ACTION: Notice of Government owned inventions available for licensing.

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SUMMARY: The inventions listed below are owned by the U.S. Government, 
as represented by the Department of Commerce, and are available for 
licensing in accordance with 35 U.S.C. 207 and 37 CFR Part 404 to 
achieve expeditious commercialization of results of federally funded 
research and development.

FOR FURTHER INFORMATION CONTACT:
Technical and licensing information on these inventions may be obtained 
by writing to: Marcia Salkeld, National Institute of Standards and 
Technology, Office of Technology Partnerships, Physics Building, Room 
B-256, Gaithersburg, MD 20899; Fax 301-869-2751. Any request for 
information should include the NIST Docket No. and Title for the 
relevant invention as indicated below.

SUPPLEMENTARY INFORMATION: The inventions available for licensing are:

NIST Docket No. 94-031

    Title: Friction and Wear Resistant Coatings For Titanium and Its 
Alloys.
    Description: This NIST invention is a method to control friction 
and wear of titanium and its alloys through the use of novel coatings. 
The coatings contain epoxide polymers with anti-wear fillers.

NIST Docket No. 95-034CIP

    Title: Overlay Target and Measurement Procedure to Enable Self-
Correction for Wafer-Induced and Tool-Induced Shift by All-Imaging-
Sensor Means.
    Description: The estimates of overlay extracted by a metrology 
instrument from standard targets on IC wafers are ordinarily burdened 
by difficult-to-estimate systematic errors called shifts. The first of 
two parts of this invention is to replacement of a standard overlay 
target used in normal IC fabrication practice with multiple instances 
of a so-called target unit. The referenced target units constitute a 
single so-called self-calibrating optical-overlay target structure. 
Each target unit is a standard target having an additional grouping of 
features called a null-detector subsystem. The null-detector subsystems 
embodied in the new self-calibrating optical-overlay target structure 
enable the extraction of zero-overlay indices. The second part of the 
invention includes modification to the metrology instrument's target 
scanning and imaging systems to provide supplementary inspection of the 
null-detector susystems. The zero-overlay indices, when analyzed in 
conjunction with the burdened overlay estimates extracted from the 
corresponding multiple instances of the standard targets within the 
same self-calibrating optical-overlay target structure, enable an 
estimate of the shift affecting the overlay measurements. The unique 
novelty of providing self-calibration of the metrology instrument, with 
respect to shift, on the same substrate as that from which overlay 
estimates are sought by the user has significant commercial importance.

    Dated: September 15, 1995.
Samuel Kramer,
Associate Director.
[FR Doc. 95-23639 Filed 9-22-95; 8:45 am]
BILLING CODE 3510-13-M